Wafer

Si wafer

• Substrate size: up to 8 inch (Grade: Dummy, Test, Prime)
• Orientation : (100), (110), (111)
• Thickness: 100 - 1000 um

Glass wafer

• Substrate size: up to 8 inch
• Type: Borofloat33, Eagle XG, Quartz, Fused Silica

Plastic substrate

• Type: PI, COC, PMMA, PS, PDMS etc.,

Other wafers

• Type: ITO wafer, SOG wafer, SOI wafer, LN wafer etc.

Materials for photolithography

Photoresist

• AZ series: GXR601,4330, 5214E, nLoF, 9260 etc.,
• SU series : 2002, 2005, 2010, 2025, 2050, 2100 etc.,
• AR-N series : 4400-10, 4400-25, 4400-50 etc., 
• Others: PI series, JSR(THB 151N), DL 1000 etc.,

Materials for process

• Developers: AZ MIF 300, AZ 400K , SU-8 Developer, JSR Developer etc.,
• Etching Solution : TMAH, KOH, Au etchant, CR-7, Al etchant etc.,
• Electroplating solution: Ni
• Other solution : Lift off solution